Rapid Migration of Defects in Ion-Implanted Silicon

Rapid Migration of Defects in Ion-Implanted Silicon

著者名:

Lalita, J.

掲載資料名:

Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

469

発行年:

1997

開始ページ:

239

出版情報:

Pittsburg, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993730 [1558993738]

言語:

英語

請求記号:

M23500/469

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00016586
シリーズID:	PA00000011
会議名:	Symposium on defects and diffusion in silicon processing
回次:	1997
会議開催地:	San Francisco, CA, USA
会議開催年:	1997.04.01-1997.04.04

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2 国際会議録 Doping of Silicon Carbide by Ion Implantation Svensson, B.G., Hallen, A., Linnarsson, M.K., Kuznetsov, A.Yu., Janson, M.S, Aberg, D., Oesterman, J., Persson, P.O.A., … Trans Tech Publications	8 国際会議録 Dissociation of Deuterium-Defect Complexes in Ion-Implanted Epitaxial 4H-SiC Janson, M., Linnarsson, M. K., Hallen, A., Svensson, B. G. MRS - Materials Research Society
3 国際会議録 Channeling Measurements of Ion Implantation Damage in 4H-SiC Kuznetsov, A.Yu., Janson, M.S., Hallen, A., Svensson, B.G., Jagadish, C., Gruenleitner, H., Pensl, G. Trans Tech Publications	9 国際会議録 Channeled Implants in 6H Silicon Carbide Janson, M. S., Hallen, A., Godignon, P., Kuznetsov, A. Yu., Linnarsson, M. K., Morvan, E., Svensson, B. G. Trans Tech Publications
4 国際会議録 Ion Implantation Processing and Related Effects in SiC Svensson, B.G., Hallen, A., Wong-Leung, J., Janson, M.S., Linnarsson, M.K., Kuznetsov, A.Yu., Alfieri, G., Grossner, U., … Trans Tech Publications	10 国際会議録 Room-Temperature Migration of Ion-Implanted Boron in Silicon Collart, E. J. H., Weemers, K., Gravesteijn, D. J., Berkum, J. G. M. van, Cowern, N. E. B. MRS - Materials Research Society
5 国際会議録 Range Distributions of Implanted Ions in Silicon Carbide Janson, M.S., Linnarsson, M.K., Hallen, A., Svensson, B.G. Trans Tech Publications	11 国際会議録 Growth and Characterization of Silicon Nanocrystals Obtained by Ion Implantation Dias, G. O., Mestanza, S. N. M., Queiroz, J. E. C., Marins, E. S. V. P., Doi, I., Rodriguez, E., Tejero, D. C. B. Electrochemical Society
6 国際会議録 Range Distributions of Implanted Ions in Silicon Carbide Janson, M.S., Linnarsson, M.K., Hallen, A., Svensson, B.G. Trans Tech Publications	12 国際会議録 Implantation Temperature Dependent Deep Level Defects in 4H-SiC Aberg, D., Storasta, L., Hallen, A., Svensson, B.G. Trans Tech Publications

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