Reactive-Sputter Deposition of TiN/ZrN and TiN/CrN Multilayers: Structural and Mechanical Properties

Reactive-Sputter Deposition of TiN/ZrN and TiN/CrN Multilayers: Structural and Mechanical Properties

著者名:

Soe, W-H.

掲載資料名:

Interfacial engineering for optimized properties : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

458

発行年:

1997

開始ページ:

373

出版情報:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993624 [1558993622]

言語:

英語

請求記号:

M23500/458

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00016585
シリーズID:	PA00000011
会議名:	Symposium on interfacial engineering for optimized properties
回次:	1996
会議開催地:	Boston, MA, USA
会議開催年:	1996.12.02-1996.12.05

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2 国際会議録 Structure and Mechanical Properties of Titanium Nitride, Zirconium Nitride, and Chromium Nitride Films by Reactive Magnetron-Sputter Deposition Soe, W-H., Kitagaki, T., Ueda, H., Shima, N., Otsuka, M., Yamamoto, R. MRS - Materials Research Society	8 国際会議録 Structural Characterization of Epitaxial GMR Magnetic Multilayers and Spin Valves Grown by Sputter Deposition Geng, H., Loloee, R., Heckman, J.W., Bass, J., Pratt, Jr., W.P., Crimp, M.A. Materials Research Society
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4 国際会議録 Perpendicular Magnetic Anisotropy and Magneto-Optical Properties of Sputtered RE-TM(CoGd)/Pd Multilayered Films Yang, T., Soe, W-H., Liu, B. X., Yamamoto, R. MRS - Materials Research Society	10 国際会議録 CrN Deposition by Reactive High-Power Density Pulsed Magnetron Sputtering A.P. Ehiasarian, W.-D. Manz, L. Hultman, U. Helmersson Society of Vacuum Coaters
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