Blank Cover Image

Correlation of Electrical and Physical Properties of SIMOX BOX Affected by Various Implantation Parameters

著者名:
Yoon, J. U.
Kim, G. N.
Krska, J-H. Y.
Chung, J. E.
Allen, L. P.
Goodson, K.
Kaeding, O.
Nauka, K.
さらに 3 件
掲載資料名:
Amorphous and crystalline insulating thin films--1996 : symposium held December 2-4, 1996, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
446
発行年:
1997
開始ページ:
193
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993501 [1558993509]
言語:
英語
請求記号:
M23500/446
資料種別:
国際会議録

類似資料:

1 国際会議録 Electrical Properties of GaN/InGaN MQW Heterojunction Diodes as Affected by Various Plasma Treatments

Kim, J., Luo, B., Mehandru, R., Ren, F., Lee, K.P., Pearton, S.J., Polyakov, A.Y., Smirnov, N.B., Govorkov, A.V., …

Materials Research Society
7 国際会議録 Low-Energy Implantation and Transient-Enhanced Diffusion: Physical Mechanisms and Technology Implications

Cowern, N. E. B., Collart, E. J. H., Politiek, J., Bancken, P. H. L., Berkum, J. G. M. van, Larsen, K. Kyllesbech, …

MRS - Materials Research Society
2 国際会議録 MONITORING SIMOX LAYER PROPERTIES AND IMPLANTATION TEMPERATURE BY OPTICAL MEASUREMENTS

Harbeke, G., Steigneier, E. F., Hemment, P. L. F., Reeson, K. J., Jastrzebski, L.

Materials Research Society
8 国際会議録 Electrochemical analysis of SIMOX buried oxides

Allen, L P, Anc, M J, Duffy, M, Parechanian, J H, Yap, J H

Electrochemical Society
3 国際会議録 Analysis of structural and electrical characteristics of low dose SIMOX

Anc, M.J., Allen, L.P., McMarr, P.J., Mrstik, B.J., Hughes, H.L., Brothers, C.P.

Electrochemical Society
9 国際会議録 Electrical and Optical Properties of Polymer Field-Effect Transistors Fabricated on a Paper-based Flexible Substrate

Seong, J. Y., Chung, K. S., Kim, Y. H., Moon, D. G., Ham, J. I., Kim, W. K.

Electrochemical Society
4 国際会議録 HVEM AND ELECTRICAL CHARACTERISATION OF SIMOX STRUCTURES

DeVeirman, A., Yallup, K., Van Landuyt, J., Maes, H. E., de Meyer, K., Dupas, L.

Materials Research Society
10 国際会議録 DETERMINATION OF THE NITROGEN CONTENT OF AS-IMPLANTED AND ANNEALED SIMOX SUBSTRATES

Kilner, J. A., Chater, R. J., Biswas, S., Hemment, P. L. F., Reeson, K. J.

Materials Research Society
5 国際会議録 Densification and Dielectric Properties of Glass/Ceramic Composites Sintered with Various Borosilicate Glass

S.O. Yoon, K.S. Kim, S. Kim, S.H. Shim, J.G. Park

Trans Tech Publications
11 国際会議録 CORRELATION OF OXYGEN AND RECOMBINATION CENTERS ON A MICROSCALE IN Aa-GROWN CZOCHRALSKI SILICON CRYSTALS

Nauka, K., Gatos, H. C., Lagowski, J.

North-Holland
6 国際会議録 Comparison of properties of electrical test structures patterned in BESOI and SIMOX films for CD reference-material applications

Allen,R.A., Ghoshtagore,R.N., Cresswell,M.W., Linholm,L.W., Sniegowski,J.J.

SPIE-The International Society for Optical Engineering
12 国際会議録 Correlation between the optical and electrical parameters of ZnSe thin films (Invited Paper)

Venkatachalam, S., Jeyachandran, Y. L., SenthilKumar, V., Mangalaraj, D., Narayandass, Sa. K., Kim, K., Yi, J.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12