Formation of Ti:sapphire thin films on single-crystal sapphire and GaAs substrates by pulsed laser deposition

Formation of Ti:sapphire thin films on single-crystal sapphire and GaAs substrates by pulsed laser deposition

著者名:

Atanasov,P.A. ( Institute of Electronics )
Tomov,R.I.
Peshev,Z.Y.
Dikovska,A.Og.
Tsaneva,V.N.

掲載資料名:

Laser Applications in Microelectronic and Optoelectronic Manufacturing II

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

2991

発行年:

1997

開始ページ:

267

終了ページ:

272

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819424020 [0819424021]

言語:

英語

請求記号:

P63600/2991

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00016567
シリーズID:	PA00000029
会議名:	Photonics West : Laser Applications in Microelectronic and Optoelectronic Manufacturing
回次:	1997 : 2nd
会議開催地:	San Jose, CA, USA
会議開催年:	1997.02.10-1997.02.12

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