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Laser machining of single-mode rib waveguides on germanosilicate slabs

著者名:
掲載資料名:
Laser Applications in Microelectronic and Optoelectronic Manufacturing II
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2991
発行年:
1997
開始ページ:
170
終了ページ:
174
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424020 [0819424021]
言語:
英語
請求記号:
P63600/2991
資料種別:
国際会議録

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