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Patterned eutectic bonding with Al/Ge thin films for MEMS

著者名:
掲載資料名:
Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2639
発行年:
1995
開始ページ:
46
終了ページ:
52
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819420053 [0819420050]
言語:
英語
請求記号:
P63600/2639
資料種別:
国際会議録

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