Ion-Beam Modifiction of Semiconductors and Related Electronic Materials
- 著者名:
- Elliman,R.G.
- 掲載資料名:
- Materials science applications of ion beam techniques : proceedings of the International Symposium on Materials Science Applications of Ion Beam Techniques, incoeporating the 1st German-Australian Workshop on Ion Beam Analysis, Seeheim, Germany, September 9-12 1996
- シリーズ名:
- Materials science forum
- シリーズ巻号:
- 248-249
- 発行年:
- 1997
- 開始ページ:
- 67
- 終了ページ:
- 72
- 出版情報:
- Zuerich, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878497676 [0878497676]
- 言語:
- 英語
- 請求記号:
- M23650
- 資料種別:
- 国際会議録
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4
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The Fabrication of High-Speed Electronic Devices by Ion-Beam Synthesis of GexSi1-x Strained Layers
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