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ECR Ar/CH4/H2 plasma damage in HgCdTe

著者名:
Kim, E.T. ( KEC Research Institute of Technology, Korea Electronics Co. Ltd., Korea )
Han, M.S.
Kwon, J.H.
Hahn, S.R.
Song, K.H.
Lee, S.G.
Lee, T.S.
Lee, Y.S.
Kim, J.M.
さらに 4 件
掲載資料名:
Infrared technology and applications XXIV : 19-24 July 1998, San Diego, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3436
発行年:
1998
巻:
Part 1
開始ページ:
84
終了ページ:
90
出版情報:
Bellingham, Wash., USA: SPIE
ISSN:
0277786X
ISBN:
9780819428912 [0819428914]
言語:
英語
請求記号:
P63600/3436
資料種別:
国際会議録

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