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CD variation sources of photomask

著者名:
  • Kim,B.G. ( Samsung Electronics Co.,Ltd.(Korea) )
  • Choi,S.W. ( Samsung Electronics Co.,Ltd.(Korea) )
  • Yu,Y.H. ( Samsung Electronics Co.,Ltd.(Korea) )
  • Yoon,H.S. ( Samsung Electronics Co.,Ltd.(Korea) )
  • Sohn,J.M. ( Samsung Electronics Co.,Ltd.(Korea) )
掲載資料名:
Photomask and X-ray mask technology IV : 17-18 April, 1997, Kawasaki, Japan
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3096
発行年:
1997
開始ページ:
42
終了ページ:
52
出版情報:
Bellingham, Washington: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819425164 [0819425168]
言語:
英語
請求記号:
P63600/3096
資料種別:
国際会議録

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