Excimer laser patterning of thick and thin films for high-density packaging(Invited Paper)
- 著者名:
- Rumsby,P.T. ( Exitech Ltd.(UK) )
- Harve,E.C. ( Exitech Ltd.(UK) )
- Thomas,D. ( Exitech Ltd.(UK) )
- Rizvi,N.H. ( Exitech Ltd.(UK) )
- 掲載資料名:
- Microelectronic Packaging and Laser Processing
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3184
- 発行年:
- 1997
- 開始ページ:
- 176
- 終了ページ:
- 185
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819426116 [0819426113]
- 言語:
- 英語
- 請求記号:
- P63600/3184
- 資料種別:
- 国際会議録
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