Cleaning force in laser cleaning of silicon substrates
- 著者名:
Song,W.D. ( Data Storage Institute(Singapore) ) Lu,Y.F. ( National Univ.of Singapore ) Ye,K.D. ( Data Storage Institute(Singapore) ) Tee,C.K. ( National Univ.of Singapore ) Hong,M.H. ( Data Storage Institute(Singapore) ) Liu,D.M. ( Data Storage Institute(Singapore) ) Low,T.S. ( Data Storage Institute(Singapore) ) - 掲載資料名:
- Microelectronic Packaging and Laser Processing
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3184
- 発行年:
- 1997
- 開始ページ:
- 158
- 終了ページ:
- 165
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819426116 [0819426113]
- 言語:
- 英語
- 請求記号:
- P63600/3184
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |