Characterization of environmental halogen molecule contamination-induced pad surface corrosion

Characterization of environmental halogen molecule contamination-induced pad surface corrosion

著者名:

Chu,P.-T. ( Taiwan Semiconductor Manufacturing Co. )

Cho,C.W. ( Taiwan Semiconductor Manufacturing Co. )

Hsiao,H.C. ( Taiwan Semiconductor Manufacturing Co. )

Wu,J.S. ( Taiwan Semiconductor Manufacturing Co. )

Hung,C.C. ( Taiwan Semiconductor Manufacturing Co. )

Chao,Y.C ( Taiwan Semiconductor Manufacturing Co. )

さらに 1 件

掲載資料名:

Microelectronic Manufacturing Yield, Reliability, and Failure Analysis III

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3216

発行年:

1997

開始ページ:

19

終了ページ:

26

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819426482 [0819426482]

言語:

英語

請求記号:

P63600/3216

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00016460
シリーズID:	PA00000029
会議名:	Microelectronic Manufacturing : Microelectronic Manufacturing Yield, Reliability, and Failure Analysis
回次:	1997 : 3rd
会議開催地:	Austin, TX, USA
会議開催年:	1997.10.01-1997.10.02

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