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Sub-100-nm and deep sub-100-nm MOS transistor gate patterning

著者名:
Xiang,Q. ( Advanced Micro Devices,Inc. )
Gupta,S. ( Advanced Micro Devices,Inc. )
Spence,C.A. ( Advanced Micro Devices,Inc. )
Singh,B. ( Advanced Micro Devices,Inc. )
Yeap,G.C.-F. ( Advanced Micro Devices,Inc. )
Lin,M.-R. ( Advanced Micro Devices,Inc. )
さらに 1 件
掲載資料名:
Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3506
発行年:
1998
開始ページ:
243
終了ページ:
252
出版情報:
Bellingham, Washington: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429650 [0819429651]
言語:
英語
請求記号:
P63600/3506
資料種別:
国際会議録

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