Manufacturing multilevel metal CMOS with deuterium anneals for improved hot-carrier reliablility
- 著者名:
Kizilyalli,I.C. ( Lucent Technologies/Bell Labs. ) Abein,G. ( Chen,Univ.of Illinois/Urbana-Champaign ) Chen,Z. ( Chen,Univ.of Illinois/Urbana-Champaign ) Weber,G.R. ( Lucent Technologies/Bell Labs. ) Register,F. ( Univ.of Illinoisi Urbana-Champaign ) Harris,E. ( Lucent Technologies/Bell Labs. ) Chetlur,S. ( Lucent Technologies/Bell Labs. ) Higashi,G.S. ( Lucent Technologies/Bell Labs. ) Schofieled,M. ( Lucent Technologies/Bell Labs. ) Sen,S. ( Lucent Technologies/Bell Labs. ) Kotzias,B. ( Lucent Technologies/Bell Labs. ) Roy,P.K. ( Lucent Technologies/Bell Labs. ) Lyding,J.W. ( Univ.of lllinois/Urbana-Champaign ) Hess,K. ( Univ.of lllinois/Urbana-Champaign ) - 掲載資料名:
- Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3506
- 発行年:
- 1998
- 開始ページ:
- 141
- 終了ページ:
- 146
- 出版情報:
- Bellingham, Washington: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819429650 [0819429651]
- 言語:
- 英語
- 請求記号:
- P63600/3506
- 資料種別:
- 国際会議録
類似資料:
MRS - Materials Research Society |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
North-Holland |
3
国際会議録
Effects of high-density plasma processing on MOSFET matching,noise,and hot carrier reliability
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Electrochemical Society | |
Electrochemical Society |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
MRS - Materials Research Society |