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Manufacturing multilevel metal CMOS with deuterium anneals for improved hot-carrier reliablility

著者名:
Kizilyalli,I.C. ( Lucent Technologies/Bell Labs. )
Abein,G. ( Chen,Univ.of Illinois/Urbana-Champaign )
Chen,Z. ( Chen,Univ.of Illinois/Urbana-Champaign )
Weber,G.R. ( Lucent Technologies/Bell Labs. )
Register,F. ( Univ.of Illinoisi Urbana-Champaign )
Harris,E. ( Lucent Technologies/Bell Labs. )
Chetlur,S. ( Lucent Technologies/Bell Labs. )
Higashi,G.S. ( Lucent Technologies/Bell Labs. )
Schofieled,M. ( Lucent Technologies/Bell Labs. )
Sen,S. ( Lucent Technologies/Bell Labs. )
Kotzias,B. ( Lucent Technologies/Bell Labs. )
Roy,P.K. ( Lucent Technologies/Bell Labs. )
Lyding,J.W. ( Univ.of lllinois/Urbana-Champaign )
Hess,K. ( Univ.of lllinois/Urbana-Champaign )
さらに 9 件
掲載資料名:
Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3506
発行年:
1998
開始ページ:
141
終了ページ:
146
出版情報:
Bellingham, Washington: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429650 [0819429651]
言語:
英語
請求記号:
P63600/3506
資料種別:
国際会議録

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