Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.. pp.175-180, 1985. Pittsburgh, Pa.. Materials Research Society
Nauka, K. ; Walukiewicz, W. ; Lagowski, J. ; Gatos, H. C.
Pub. info.:
Microscopic identification of electronic defects in semiconductors : symposium held April 15-18, 1985, San Francisco, California, U.S.A.. pp.291-296, 1985. Pittsburgh, Pa.. Materials Research Society
Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.. pp.21-26, 1986. Pittsburgh, Pa.. Materials Research Society