1.

Conference Proceedings

Conference Proceedings
Knight, T.J. ; Cheng, X. ; Krogh, B.H. ; Greve, D.W. ; Gibson, M.A.
Pub. info.: Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.157-166,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-2
2.

Conference Proceedings

Conference Proceedings
Cheng, X. ; Holber, W. ; Basnett, R. ; Smith, D.
Pub. info.: Environmental issues in the electronics and semiconductor industries : proceedings of the second international symposium.  pp.70-78,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-8
3.

Conference Proceedings

Conference Proceedings
Knight, T.J. ; Grave, D.W. ; Cheng, X. ; Krogh, B.H.
Pub. info.: Proceedings of the eleventh International Symposium on Plasma Processing.  pp.688-699,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-12
4.

Conference Proceedings

Conference Proceedings
Cheng, X. ; Dolin, R. ; Neary, M. ; Prabhakar, S. ; Ravi Kanth, K.V. ; Wu, D. ; Agrawal, D. ; El Abbadi, A. ; Freeston, M. ; Singh, A. ; Smith, T. ; Su, J.
Pub. info.: Proceedings : IEEE International Forum on Research and Technology Advances in Digital Libraries, ADL '97 : May 7-9, 1997, Washington, DC.  pp.70-81,  1997.  Los Alamitos, CA.  IEEE Computer Society Press
Title of ser.: Advances in Digital Libraries (ADL)
Ser. no.: 1997
5.

Conference Proceedings

Conference Proceedings
Cheng, X. ; Knight, T.J. ; Greve, D.W. ; Krogh, B.H.
Pub. info.: Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.84-93,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-9
6.

Conference Proceedings

Conference Proceedings
Knight, T. ; Greve, D.W. ; Cheng, X. ; Krogh, B.
Pub. info.: Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films.  pp.537-551,  1997.  Pennington, New Jersey.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-10