Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia. pp.299-306, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Byun, I. ; Kim, S. ; Kim, Y. ; Yang, J. ; Park, S.
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Microfluidics, bioMEMS, and medical microsystems III : 24-26 January 2005, San Jose, California, USA. pp.30-37, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Kim, S. ; Kim, Y. ; Yang, J. ; Kwon, S. ; Park, S.
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Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V. pp.61110U-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering