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PIEZOELECTRIC THIN FILM ULTRASONIC MICROMOTORS

Author(s):
Udayakumar, K.R.
Chen, J.
Brooks, K.G.
Cross, L.E.
Flynn, A.M.
Ehrlich, D.J.
1 more
Publication title:
Ferroelectric thin films II : symposium held December 2-4, 1991, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
243
Pub. Year:
1992
Page(from):
49
Page(to):
54
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991378 [1558991379]
Language:
English
Call no.:
M23500/243
Type:
Conference Proceedings

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