EVALUATION OF OZONATED WATER SPRAY FOR RESIST CLEANING APPLICATIONS
- Author(s):
De Gendt, S. Lux, M. Claes, M. Van Hoeymissen, J. Conrad, T. Worth, W. Lagrange, S. Bergman, E. Jassal, A.S. Mertens, P.W. Heyns, M.M. - Publication title:
- Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 99-36
- Pub. Year:
- 1999
- Page(from):
- 391
- Page(to):
- 398
- Pages:
- 8
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772594 [1566772591]
- Language:
- English
- Call no.:
- E23400/99-36
- Type:
- Conference Proceedings
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