Weiterntwicklung der Elektronenstrahllithographie

Weiterntwicklung der Elektronenstrahllithographie

Author(s):

Dorner, Wolfgang ( VALVO Rohren-und Halbleiterwerke der Philips GmbH )
Kaker, Jurgen ( VALVO Rohren-und Halbleiterwerke der Philips GmbH )
Kastmann, Ralf ( VALVO Rohren-und Halbleiterwerke der Philips GmbH )
Luckert, Jan ( VALVO Rohren-und Halbleiterwerke der Philips GmbH )
Schwarz, Manfred ( VALVO Rohren-und Halbleiterwerke der Philips GmbH )

Publication title:

NASA Technical Reports

Pub. Year:

1983

No.:

N84-11415

Paper no.:

N84-11415

Page(from):

1

Page(to):

74

Pages:

74

Pub. info.:

National Aeronautics and Space Administration

Language:

German

Type:

Technical Paper

Details

TDL ID:

ZA00002949

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