Lithographic performance and optimization of chemically amplified single-layer resists for EUV lithograph
- Author(s):
Watanabe,T. ( Himeji Institute of Technology ) Kinoshita,H. Miyafuji,A. Irie,S. Shirayone,S. Mori,S. Yano,E. Hada,H. Ohmori,K. Komano,H. - Publication title:
- Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3997
- Pub. Year:
- 2000
- Page(from):
- 600
- Page(to):
- 607
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819436153 [0819436151]
- Language:
- English
- Call no.:
- P63600/3997
- Type:
- Conference Proceedings
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