1.

Conference Proceedings
Conference Proceedings
1. Gibbsian segregating alloys: a potential solution to minimize collector degradation
H. Qiu ; S. N. Srivastava ; J. C. Anderson ; D. N. Ruzic
Pub. info.: Emerging lithographic technologies XI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6517
2.

Conference Proceedings
Conference Proceedings
2. Debris mitigation techniques for a Sn- and Xe-fueled EUV-light source
K. C. Thompson ; S. N. Srivastava ; E. L. Antonsen ; D. N. Ruzic
Pub. info.: Emerging lithographic technologies XI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6517
3.

Conference Proceedings
Conference Proceedings
3. Contamination removal from collector optics and masks: an essential step for next-generation lithography
H. Shin ; S. N. Srivastava ; D. N. Ruzic
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518
4.

Conference Proceedings
Conference Proceedings
4. Ionic debris assessment of various EUVL systems
C. H. Castano ; D. N. Ruzic ; S. N. Srivastava ; K. C. Thompson ; J. Sporre
Pub. info.: Emerging lithographic technologies XII.  2  pp.692137-1-692137-13,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6921