Current Research activities in the field of multilayer for EUV, soft x-ray and x-rays in IPOE [6034-13]
- Author(s):
Wang Z. Wang F Zhang Z. Wang H. Wu W. Zhang S. Gu Z. Cheng X. Wang B. Qin S. Chen L. ( Tongji Univ. (China) ) - Publication title:
- ICO20: optical design and fabrication : 21-26 August 2005, Changchun, China
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6034
- Pub. Year:
- 2006
- Page(from):
- 60340D
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819460653 [0819460656]
- Language:
- English
- Call no.:
- P63600/6034
- Type:
- Conference Proceedings
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