Progress in quantum lithography (Invited Paper) [5893-15]
- Author(s):
- Boyd, R. W.
- Chang, H. J.
- Shin, H.
- O’Sullivan-Hale, ( Institute of Optics, Univ, of Rochester (USA) )
- Publication title:
- Quantum communications and quantum imaging III : 2-4 August 2005, San Diego, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5893
- Pub. Year:
- 2005
- Page(from):
- 58930G
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819458988 [0819458988]
- Language:
- English
- Call no.:
- P63600/5893
- Type:
- Conference Proceedings
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