Two- and Three-Dimensional Vision Systems for Inspection, Control, and Metrology. pp.61-68, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Arora, J. W. ; Sun, W. ; Tian, K. ; Stellman, P. ; Waller, L. ; Barbastathis, G.
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Optical Micro- and Nanometrology in Microsystems Technology. pp.618810-618810, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering