1.

Conference Proceedings

Conference Proceedings
Tajima, N. ; Saze, S. ; Sugimura, H. ; Takai, O.
Pub. info.: Thin films - stresses and mechanical properties VIII : symposium held November 29-December 3, 1999, Boston, Massachusetts, U.S.A..  pp.319-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 594
2.

Conference Proceedings

Conference Proceedings
Tajima, N. ; Saze, H. ; Sugimura, H. ; Takai, O.
Pub. info.: Amorphous and nanostructured carbon : sympoisum held November 29-December 2, 1999, Boston, Massachusetts, U.S.A..  pp.371-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 593
3.

Conference Proceedings

Conference Proceedings
Kitamura, N. ; Uchida, T. ; Sugimura, H. ; Masuhara, H.
Pub. info.: Proceedings of the second International Symposium on Electrochemical Processing of Tailored Materials.  pp.187-200,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-12
4.

Conference Proceedings

Conference Proceedings
Sugimura, H. ; Uchida, T. ; Kitamura, N. ; Shimo, N. ; Masuhara, H.
Pub. info.: Proceedings of the second International Symposium on Electrochemical Processing of Tailored Materials.  pp.227-238,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-12
5.

Conference Proceedings

Conference Proceedings
Sugimura, H. ; Hanji, T. ; Takai, O. ; Fukuda K. ; Misawa, H.
Pub. info.: Materials issues and modeling for device nanofabrication : symposia held November 29-December 2, 1999, Boston, Massachusetts, U.S.A..  pp.163-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 584
6.

Conference Proceedings

Conference Proceedings
Eguchi, H. ; Sugimura, H. ; Koike, K. ; Sakaue, H. ; Arimoto, H. ; Ogawa, K. ; Susa, T. ; Kunitani, S. ; Kurosu, T. ; Yoshii, T. ; Itoh, K.
Pub. info.: Emerging Lithographic Technologies X.  pp.61511G-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6151
7.

Conference Proceedings

Conference Proceedings
Sugimura, H. ; Eguchi, H. ; Norimoto, M. ; Negishi, Y. ; Yonekura, I. ; Ito, K. ; Tamura, A. ; Koba, F. ; Arimoto, H
Pub. info.: Emerging Lithographic Technologies X.  pp.61511F-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6151
8.

Conference Proceedings

Conference Proceedings
Sugimura, H. ; Eguchi, H. ; Yoshii, T. ; Tamura, A.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.925-933,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130
9.

Conference Proceedings

Conference Proceedings
Eguchi, H. ; Kurosu, T. ; Yoshii, T. ; Sugimura, H. ; Itoh, K. ; Tamura, A.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.879-887,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130
10.

Conference Proceedings

Conference Proceedings
Eguchi, H. ; Kurosu, T. ; Yoshii, T. ; Sugimura, H. ; Itoh, K. ; Tamura, A.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.871-879,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256