Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas. pp.10-16, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Microelectronic Structures and MEMS for Optical Processing III. pp.11-21, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering