1.

Conference Proceedings
Conference Proceedings
1. Performance trade-offs for a surface micromachined microengine
Miller,S.L. ; Sniegowski,J.J. ; LaVigne,G. ; McWhorter,P.J.
Pub. info.: Micromachined devices and components II : 14-15 October 1996, Austin, Texas.  pp.182-191,  1996.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2882
2.

Conference Proceedings
Conference Proceedings
2. Characterization of the embedded micromechanical device approach to the monolithic integration of MEMS with CMOS
Smith,J.H. ; Montague,S. ; Sniegowski,J.J. ; Murray,J.R. ; Manginell,R.P. ; McWhorter,P.J. ; Huber,R.J.
Pub. info.: Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas.  pp.306-314,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2879
3.

Conference Proceedings
Conference Proceedings
3. Friction in surface-micromachined microengines
Miller,S.L. ; Sniegowski,J.J. ; LaVigne,G. ; McWhorter,P.J.
Pub. info.: Smart structures and materials 1996 : Smart electronics and MEMS : 28-29 January, 1996, San Diego, California.  pp.197-204,  1996.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2722
4.

Conference Proceedings
Conference Proceedings
4. Routes to failure in rotating MEMS devices experiencing sliding friction
Miller,S.L. ; LaVigne,C. ; Rodgers,M.S. ; Sniegowski,J.J. ; Waters,J.P. ; McWhorter,P.J.
Pub. info.: Micromachined Devices and Components III.  pp.24-30,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3224
5.

Conference Proceedings
Conference Proceedings
5. Advanced micromechanisms in a multilevel polysilicon technology
Rodgers,m.S. ; Sniegowski,J.J. ; Miller,S.L. ; Craig Barron,C. ; McWhorter,P.J.
Pub. info.: Micromachined Devices and Components III.  pp.120-130,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3224