1.

Conference Proceedings
Conference Proceedings
1. SAMPLE (Sandia agile MEMS prototyping,layout tools,and education)
Craig Barron,C. ; Davies,B.R. ; Sniegowski,J.J. ; Rodgers,M.S. ; Comtois,J.H. ; Michalicek,M.A.
Pub. info.: Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas.  pp.10-16,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3223
2.

Conference Proceedings
Conference Proceedings
2. SAMPLE (Sandia agile MEMS prototyping,layout tools,and education)
Davies,B.R. ; Craig Barron,C. ; Sniegowski,J.J. ; Rodgers,M.S.
Pub. info.: Microelectronic Structures and MEMS for Optical Processing III.  pp.11-21,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3226
3.

Conference Proceedings
Conference Proceedings
3. Advanced micromechanisms in a multilevel polysilicon technology
Rodgers,m.S. ; Sniegowski,J.J. ; Miller,S.L. ; Craig Barron,C. ; McWhorter,P.J.
Pub. info.: Micromachined Devices and Components III.  pp.120-130,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3224