Lee, J.M. ; Cho, S.H. ; Kim, T.H. ; Park, J.-G. ; Busnaina, A.A.
Pub. info.:
Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany. pp.441-444, 2003. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III. pp.228-240, 1994. Pennington, NJ. Electrochemical Society
Lee, K.-B. ; Kwak, N.-J. ; Kim, S.-D. ; Kim, C.-T. ; Fu, J. ; Nahm, M.K. ; Diaz, R. ; Lai, C.S. ; Xu, Z. ; Han, B.B. ; Park, J.-G. ; Jang, W.
Pub. info.:
Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing. pp.333-338, 1997. Pennington, NJ. Electrochemical Society
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.231-238, 1997. Pennington, NJ. Electrochemical Society
Park, J.-G. ; Rozgonyi, G.A. ; Lee, C.-S. ; Choi, S.-P.
Pub. info.:
ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology. pp.457-471, 1995. Pennington, NJ. Electrochemical Society
Lee, S.-Y. ; Lee, S.-H. ; Eom, D.-H. ; Kim, K.-S. ; Song, H.-S. ; Park, J.-G.
Pub. info.:
Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium. pp.180-186, 2001. Pennington, N.J.. Electrochemical Society
Eom, D.-H. ; Lee, S.-H. ; Kim, K.-S. ; Lee, C.-H. ; Park, J.-G.
Pub. info.:
Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium. pp.156-163, 2001. Pennington, N.J.. Electrochemical Society
Thin film materials, processes, and reliability : proceedings of the international symposium. pp.126-137, 2001. Pennington, N.J.. Electrochemical Society