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Dry etching characteristics of attenuated phase-shifting masks using Cl2/CF4/O2/He plasmas

Author(s):
Choi,S.J. ( PKL )
Cha,H.-S.
Yoon,S.-Y.
Jung,S.-M.
Choi,S.-S.
Jeong,S.-H.
1 more
Publication title:
21st Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4562
Pub. Year:
2001
Vol.:
4562
Pt.:
Two of Two Parts
Page(from):
561
Page(to):
570
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819442901 [0819442909]
Language:
English
Call no.:
P63600/4562
Type:
Conference Proceedings

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