1.

Conference Proceedings
Conference Proceedings
1. Comparison of properties of electrical test structures patterned in BESOI and SIMOX films for CD reference-material applications
Allen,R.A. ; Ghoshtagore,R.N. ; Cresswell,M.W. ; Linholm,L.W. ; Sniegowski,J.J.
Pub. info.: Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California.  pp.124-131,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3332
2.

Conference Proceedings
Conference Proceedings
2. Electrical test structures replicated in silicon-on-insulator material
Cresswell,M.W. ; Sniegowski,J.J. ; Ghoshtagore,R.N. ; Allen,R.A. ; Linholm,L.W. ; Villarrubia,J.S.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography X.  pp.659-676,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2725