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5 results

1.

Conference Proceedings

1. Performance trade-offs for a surface micromachined microengine

Miller,S.L. ; Sniegowski,J.J. ; LaVigne,G. ; McWhorter,P.J.

Pub. info.:	Micromachined devices and components II : 14-15 October 1996, Austin, Texas. pp.182-191, 1996. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2882

2.

Conference Proceedings

2. Characterization of the embedded micromechanical device approach to the monolithic integration of MEMS with CMOS

Smith,J.H. ; Montague,S. ; Sniegowski,J.J. ; Murray,J.R. ; Manginell,R.P. ; McWhorter,P.J. ; Huber,R.J.

Pub. info.:	Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas. pp.306-314, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2879

3.

Conference Proceedings

3. Friction in surface-micromachined microengines

Miller,S.L. ; Sniegowski,J.J. ; LaVigne,G. ; McWhorter,P.J.

Pub. info.:	Smart structures and materials 1996 : Smart electronics and MEMS : 28-29 January, 1996, San Diego, California. pp.197-204, 1996. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2722

4.

Conference Proceedings

4. Routes to failure in rotating MEMS devices experiencing sliding friction

Miller,S.L. ; LaVigne,C. ; Rodgers,M.S. ; Sniegowski,J.J. ; Waters,J.P. ; McWhorter,P.J.

Pub. info.:	Micromachined Devices and Components III. pp.24-30, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3224

5.

Conference Proceedings

5. Advanced micromechanisms in a multilevel polysilicon technology

Rodgers,m.S. ; Sniegowski,J.J. ; Miller,S.L. ; Craig Barron,C. ; McWhorter,P.J.

Pub. info.:	Micromachined Devices and Components III. pp.120-130, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3224

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