1.

Conference Proceedings

Conference Proceedings
Koh, C.-W. ; Lee, D.-H. ; Kim, M.-S. ; Park, S.-N. ; Kwon, W.-T.
Pub. info.: Advances in resist technology and processing XX.  2  pp.1382-1389,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039
2.

Conference Proceedings

Conference Proceedings
Hyun, Y.-S. ; Kim, D.-J. ; Koh, C.-W. ; Park, S.-N. ; Kwon, W.-T.
Pub. info.: Optical Microlithography XVI.  Part Two  pp.941-947,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040