1.

Conference Proceedings
Conference Proceedings
1. Stabilization of Low Dielectric Constant SiOF Films by Post-Deposition Annealing
Kim, H.-H. ; Lee, S.-K. ; Kim, S.-O. ; Kim, Y.-H. ; Kim, H.J. ; Sohn, Y.-S. ; Yang, H.-S. ; Kim, C.-T. ; Kim, D.H.
Pub. info.: Proceedings of the Second International Symposium on Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues.  pp.126-135,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-8
2.

Conference Proceedings
Conference Proceedings
2. Deposition and Characterization of SiOF Films for Multi-level IMD
Kim, H.-H. ; Lee, S.-K. ; Kim, S.-O. ; Kim, Y.-H. ; Kim, H.J. ; Sohn, Y.-S. ; Yang, H.-S. ; Kim, C.-T. ; Kim, D.-H.
Pub. info.: Proceedings of the Second International Symposium on Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues.  pp.148-156,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-8