Philit, G. ; von Aswege, L. ; Madore, M. ; Wolke, K. ; Clech, M.-C. ; Asselin-Degrange, E. ; Chabli, A. ; Louis, D.
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Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium. pp.356-361, 2003. Pennington, NJ. Electrochemical Society
Onsia, B. ; Schellkes, E. ; Vos, R. ; De Gendt, S. ; Doll, O. ; Fester, A. ; Kolbesen, B. ; Hoffman, M. ; Hatcher, Z. ; Wolke, K. ; Mertens, P. ; Heyns, M.
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Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium. pp.23-30, 2001. Pennington, N.J.. Electrochemical Society