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Formation of submicrometer current-blocking layer for high-power GaAs/AlGaAs quantum wire array laser

Author(s):
Kim,T.-G. ( Korea Univ. )
Hwang,S.-M.
Kim,S.-I.
Son,C.-S.
Kim,E.K.
Min,S.-K.
Park,J.-H.
Park,K.-H.
3 more
Publication title:
Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing VI : 11-13 March 1996, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2723
Pub. Year:
1996
Page(from):
63
Page(to):
67
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819420992 [0819420999]
Language:
English
Call no.:
P63600/2723
Type:
Conference Proceedings

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