1.

Conference Proceedings

Conference Proceedings
Jastrzebski, L. ; Henley, W. ; DeBusk, D. ; Haddad, N. ; Lowell, J. ; Wenner, V. ; Nauka, K. ; Persson, E.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.530-536,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
2.

Conference Proceedings

Conference Proceedings
Yoon, J. U. ; Kim, G. N. ; Krska, J-H. Y. ; Chung, J. E. ; Allen, L. P. ; Goodson, K. ; Kaeding, O. ; Nauka, K.
Pub. info.: Amorphous and crystalline insulating thin films--1996 : symposium held December 2-4, 1996, Boston, Massachusetts, U.S.A..  pp.193-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 446