Layer Transfer and Characterization of SOI and GeOI Substrates
- Author(s):
Liu, Z.X. Loryuenyoung, V. Cheung, N.W. Schmidt, B. Chen, P. Lau, S.S. - Publication title:
- Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2005-02
- Pub. Year:
- 2005
- Page(from):
- 96
- Page(to):
- 105
- Pages:
- 10
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774604 [1566774608]
- Language:
- English
- Call no.:
- E23400/200502
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Selective UV-Laser Processing for Liftoff of GaN Thin Films from Sapphire Substrates
Electrochemical Society |
Materials Research Society |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
FORMATION OF SILICON ON INSULATOR (SOI) WITH SEPARATION BY PLASMA IMPLANTATION OF OXYGEN (SPIMOX)
MRS - Materials Research Society |
9
Conference Proceedings
Formation and Characteristics of CoSi2 Layers Synthesized by MEVVA Implantation
MRS - Materials Research Society |
Materials Research Society |
10
Conference Proceedings
Formation and Characteristics of CoSi2 Layers Synthesized by MEVVA Implantation
MRS - Materials Research Society |
SPIE-The International Society for Optical Engineering |
Materials Research Society |
6
Conference Proceedings
Electrical Characterization Of Simox Soi Wafers With Mosos C-V Measurements
Materials Research Society |
12
Conference Proceedings
Anisotropic Delamination Energy of Bonded Rippled Silicon Surfaces Created by Ar+ Bombardment
Materials Research Society |