1.

Conference Proceedings

Conference Proceedings
Shribak,M.I. ; Inoue,S. ; Oldenbourg,R.
Pub. info.: Polarization analysis, measurement, and remote sensing IV : 29-31 July 2001, San Diego, USA.  pp.163-174,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4481
2.

Conference Proceedings

Conference Proceedings
Inoue,S. ; Fujisawa,T. ; Izuha,K.
Pub. info.: Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California.  pp.810-818,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3998
3.

Conference Proceedings

Conference Proceedings
Kawamura,E. ; Nagai,K. ; Kanemitsu,H. ; Tabata,Y. ; Inoue,S.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part2  pp.927-934,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
4.

Conference Proceedings

Conference Proceedings
Shimoda,T. ; Inoue,S. ; Utsunomiya,S.
Pub. info.: Flat panel display technology and display metrology II : 22-23 January 2001, San Jose, [California] USA.  pp.52-59,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4295
5.

Conference Proceedings

Conference Proceedings
Irie,N. ; Muramatsu,K. ; Ishii,Y. ; Magome,N. ; Umatate,T. ; Kyoh,S. ; Tanaka,S. ; Inoue,S. ; Higashikawa,I. ; Mori,I. ; Okumura,K.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  pp.34-45,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186
6.

Conference Proceedings

Conference Proceedings
Irie,N. ; Muramatsu,K. ; Ishii,Y. ; Magome,N. ; Umatate,T. ; Kyoh,S. ; Tanaka,S. ; Inoue,S. ; Higashikawa,I. ; Mori,I. ; Okumura,K.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VII.  pp.641-648,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4066
7.

Conference Proceedings

Conference Proceedings
Kyoh,S. ; Tanaka,S. ; Inoue,S. ; Higashikawa,I. ; Mori,I. ; Okumura,K. ; Irie,N. ; Muramatsu,K. ; Ishii,Y. ; Magome,N. ; Umatate,T.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VII.  pp.631-640,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4066
8.

Conference Proceedings

Conference Proceedings
Yamanouchi,Y. ; Mitsumine,H. ; Inoue,S. ; Shimoda,S.
Pub. info.: Visual Communications and Image Processing 2000.  Part3  pp.1517-1524,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4067
9.

Conference Proceedings

Conference Proceedings
Kyoh,S. ; Tanaka,S. ; Inoue,S. ; Higashikawa,I. ; Mori,I. ; Okumura,K. ; Irie,N. ; Muramatsu,K. ; Ishii,Y. ; Magome,N. ; Umatate,T.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  pp.494-502,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186
10.

Conference Proceedings

Conference Proceedings
Sato,K. ; Inoue,S.
Pub. info.: Optical Microlithography XIV.  4346  pp.379-386,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346