Sleight, J.W. ; Bryant, A. ; Clark, W. ; leong, M. ; Nowak, E.J. ; Rausch, W. ; Sherony, M.J.
Pub. info.:
Silicon-on-Insulator Technology and Devices X : proceedings of the tenth International Symposium. pp.245-250, 2001. Pennington, N.J.. Electrochemical Society