K. Yamada ; H. Yamada ; N. Konishi ; Y. Kawai ; T. Ohmi
Pub. info.:
Proceedings of the Symposia on Interconnects, Contact Metallization, and Multilevel Metallization and Reliability for Semiconductor Devices, Interconnects, amd Thin Insulator Materials. pp.256-267, 1993. Pennington, NJ. Electrochemical Society
W. Masuda ; H. Yamada ; N. Naitoh ; H. Fujii ; T. Atsuta
Pub. info.:
Tenth International Symposium on Gas Flow and Chemical Lasers : 5-9 September 1994, Friedrichshafen, Germany. pp.244-249, 1995. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering