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Conference Proceedings

1. Reaction Mechanism of the Carbonization Process by Low-Energy Ion Subplantation

Tsubouchi, N. ; Chayahara, A. ; Mokuno, Y. ; Kinomura, A. ; Horino, Y.

Pub. info.:	Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001. pp.363-366, 2002. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	389-393

Conference Proceedings

2. Reaction Mechanism of the Carbonization Process by Low-Energy Ion Subplantation

Tsubouchi, N. ; Chayahara, A. ; Mokuno, Y. ; Kinomura, A. ; Horino, Y.

Pub. info.:	Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001. pp.363-366, 2002. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	389-393