Souifi, A. ; Bremond, G. ; Benyattou, T. ; Guillot, G. ; Dutartre, D.
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Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.247-252, 1992. Pittsburgh, Pa.. Materials Research Society
Bru-Chevallier, C. ; Trui, B. ; Souifi, A. ; Bremond, G. ; Guillot, G. ; Chroboczek, J. A.
Pub. info.:
Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.. pp.295-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society