1.

Conference Proceedings

Conference Proceedings
Saxena, S. ; Guardiani, C. ; Quarantelli, M. ; Dragone, N. ; Minehane, S. ; McNamara, P. ; Babcock, J.A.
Pub. info.: Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA.  pp.246-250,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5042
2.

Conference Proceedings

Conference Proceedings
Hua, Y. ; Saxena, S. ; King, W. P. ; Henderson, C. L.
Pub. info.: Advances in Resist Technology and Processing XXIII.  pp.61531G-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6153
3.

Technical Paper

Technical Paper
Saxena, S. ; Nair, M.
Pub. info.: AIAA meeting papers on disc.  2005.  [Reston, Va.].  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : Aerospace Sciences Meeting and Exhibit
Ser. no.: 43rd