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Conference Proceedings

1. 53. Effect of thermal annealing on mist-deposited HISiO4/SiO,/Si structures

Chong, K. ; Lee, D.-O. ; Shanmugosondoroni, K. ; Romon, P. ; Shallenberger, J. ; Wang, I. ; Mumbaner, P. ; Grant, R. ; Rusyllo, J.

Pub. info.:	Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium. pp.429-436, 2003. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2003-14

Conference Proceedings

2. THE ROLE OF MEGASONIC ENERGY IN PARTICULATE REMOVAL FROM SILICON SUBSTRATES IN DILUTE SC1 CHEMISTRY

Kashkoush, I. ; Brause, E. ; Grant, R. ; Novak, R.

Pub. info.:	Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.168-175, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-35

Conference Proceedings

3. Studies of High-k Gate Dielectrics Deposited hy the Liquid Source Misted Chemical Deposition Method

Lee, D. ; Roman, P. ; Mumbauer, P. ; Grant, R. ; Horn, M. ; Ruzyllo, J.

Pub. info.:	Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium. pp.237-242, 2000. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2000-5

Conference Proceedings

4. Characterization of High-K Dielectrics Using the Non-Contact Surface Charge Profiler (SCP) Method

Roman, P. ; Lee, D. ; Mumbauer, P. ; Grant, R. ; Kamieniecki, E. ; Ruzyllo, J.

Pub. info.:	Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium. pp.187-192, 2000. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2000-5

Conference Proceedings

5. STUDY OF THE EFFECT OF SILICON SURFCE TREATMENT ON EOT IN HIGH-k DIELECTRIC MOS GATE STACK

Chang, K. ; Shanmugasundaram, K. ; Lee, D.-O. ; Roman, P. ; Shallenberger, J. ; Chang, F.-M. ; Wang, J. ; Beck, R. ; Mumbauer, P. ; Grant, R. ; Ruzyllo, J.

Pub. info.:	Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium. pp.78-85, 2003. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2003-26

Conference Proceedings

6. Selective Remote Plasma Etching of Si3N4 Over SIO2 at Elevated Temperature

Staffa, J. ; Luther, B. ; Hwang, D. ; Ruzyllo, J. ; Grant, R. ; March, D.

Pub. info.:	ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology. pp.283-289, 1995. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	95-5

Conference Proceedings

7. Conditioning of Silicon Surface After RIE Using O2 and NF3 Remote Plasma

Hwang, D.K. ; Ruzyllo, J. ; Grant, R.

Pub. info.:	ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology. pp.230-235, 1995. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	95-5

Conference Proceedings

8. GAS-PHASE SURFACE CONDITIONING IN A HIGH-k GATE CLUSTER

Roman, P. ; Lee, D.-O. ; Wang, J. ; Wu, C.-T. ; Subramanian, V. ; Brubaker, M. ; Mumbauer, P. ; Grant, R. ; Ruzyllo, J.

Pub. info.:	Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium. pp.241-248, 2001. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2001-26

Conference Proceedings

9. Characterization of Thin Dielectric Layers using the Non-Contact Surface Charge Profiler (SCP) Method

Roman, P. ; Lee, D.D. ; Wang, J. ; Mumbauer, P. ; Grant, R. ; Tower, J. ; Kamieniecki, E. ; Lukasiak, L. ; Ruzyllo, aud J.

Pub. info.:	Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium. pp.207-212, 2001. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2001-13

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Technical Paper

10. Prediction of Gas Turbine Blade Life: An Interdisciplinary Engineering Approach for Condition-Based Maintenance.

Jin, H. ; Pistor, R. ; Lowden, P. ; Weber, B. ; Grant, R.

Pub. info.:	A.S.M.E. paper. 2006. New York, NY. American Society of Mechanical Engineers
Title of ser.:	ASME Technical Paper : GT
Ser. no.:	2006

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Author: Grant, R.