1.

Conference Proceedings
Conference Proceedings
1. SIMULATOR FOR DYNAMIC ION BEAM MIXING
Seidl, A. ; Fujii, K. ; Kiuchi, M. ; Satou, M. ; Takai, M.
Pub. info.: Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.29-34,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 279
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Conference Proceedings
Conference Proceedings
2. Influence of mask induced polarization effects on a pattern printability
Ishimaru, T. ; Matsuura, S. ; Seki, M. ; Fujii, K. ; Koizumi, R. ; Hakataya, Y. ; Moriya, A.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.576-586,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
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Conference Proceedings
Conference Proceedings
3. Investigation of polarization effects on new mask materials
Itakura, Y. ; Kawasa, Y. ; Wakabayashi, O. ; Moriya, M. ; Nagai, S. ; Sumitani, A. ; Hagiwara, T. ; Ishimaru, T. ; Tsuji, S. ; Fujii, K. ; Wakamiya, W.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.587-598,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
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Conference Proceedings
Conference Proceedings
4. Novel Wet Taper Etching of Interconnects on Large Area Substrates Using Galvanic Reaction
Kaneko, T. ; Hashimoto, Y. ; Ono, K. ; Fujii, K. ; Onisawa, K.
Pub. info.: Thin Film Transistor Technologies V : proceedings of the International Symposium.  pp.160-168,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-31
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Conference Proceedings
Conference Proceedings
5. Novel testing scheme for selection of capacitive fingerprint sensor LSIs
Shimamura, T. ; Morimura, H. ; Unno, H. ; Fujii, K. ; Shigematsu, S. ; Machida, K. ; Kyuragi, H.
Pub. info.: Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia.  pp.23-30,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4593
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Conference Proceedings
Conference Proceedings
6. High potential performances of tubular type SOFC using metallic system components
Momma, A. ; Kaga, Y. ; Fujii, K. ; Hohjyo, K. ; Kanazawa, M. ; Okuo, T.
Pub. info.: Proceedings of the Fifth International Symposium on Solid Oxide Fuel Cells (SOFC-V).  pp.311-320,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-40
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Conference Proceedings
Conference Proceedings
7. CHARACTERIZATION OF DEFECTS IN Gap, GaAs AND GaAs1-xPx ELECTROLUMINESCENT DIODES BY TRANSMISSION ELECTRON MICROSCOPE
Hirata, M. ; Takeda, S. ; Fujii, K.
Pub. info.: Defects in electronic materials : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.495-498,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 104
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Conference Proceedings
Conference Proceedings
8. MICRO-RBS ANALYSIS OF MASKLESSLY FABRICATED STRUCTURES
Kinomura, A. ; Takai, M. ; Matsuo, T. ; Satou, M. ; Kiuchi, M. ; Fujii, K. ; Namba, S.
Pub. info.: Processing and characterization of materials using ion beams : symposium held November 28-December 2, 1988, Boston, Massachusetts, U.S.A..  pp.743-748,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 128
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Conference Proceedings
Conference Proceedings
9. Recording and reconstruction of 3D color images of practical objects by phase-shifting holography [6030-05]
Hamada, Y. ; Sato, K. ; Morimoto, M. ; Fujii, K.
Pub. info.: ICO20 : display devices and systems : 21-26 August, 2005, Changchun, China.  pp.603005-603005,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6030
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Conference Proceedings
Conference Proceedings
10. Reconstruction of full-color images with a RGB time-sharing holographic display system [6030-04]
Sato, K. ; Sugita, A ; Morimoto, M. ; Fujii, K.
Pub. info.: ICO20 : display devices and systems : 21-26 August, 2005, Changchun, China.  pp.603004-603004,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6030
11.

Conference Proceedings
Conference Proceedings
11. Information reduction in hologram and a 3D display with a movable light source [6030-06]
Hamada, M. ; Sato, K. ; Morimoto, M. ; Fujii, K.
Pub. info.: ICO20 : display devices and systems : 21-26 August, 2005, Changchun, China.  pp.603006-603006,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6030
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Conference Proceedings
Conference Proceedings
12. PROPERTIES OF DIAMONDLIKE CARBON FILMS
Fujii, K. ; Yokota, S.H. ; Sh?hata, N.
Pub. info.: Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.765-772,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 75
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Conference Proceedings
Conference Proceedings
13. Development of high-speed laser soldering process for lead-free solder with diode laser
Wang, J. ; Watanabe, M. ; Goto, Y. ; Fujii, K. ; Kuriaki, H. ; Satoh, M. ; Ikeda, J. ; Fujimoto, K.
Pub. info.: First International Symposium on High-Power Laser Macroprocessing : 27-31 May 2002, Osaka, Japan.  pp.26-31,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4831
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Conference Proceedings
Conference Proceedings
14. SUPPRESSION OF ION-INDUCED CHARGE COLLECTION BY HIGH-ENERGY B+-IMPLANTED LAYER
Kishimoto, T. ; Sayama, H. ; Takai, M. ; Ohno, Y. ; Sonoda, K. ; Nishimura, T. ; Kinomura, A. ; Horino, Y. ; Fujii, K.
Pub. info.: Beam-solid interactions for materials synthesis and characterization : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A..  pp.135-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 354
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Conference Proceedings
Conference Proceedings
15. Structure-Activity Relationship of Insulin-Mimetic Vanadyl Complexes with VO(N2O2) Coordination Mode
Sakurai, H. ; Fujii, K. ; Fujimoto, S. ; Fujisawa, Y. ; Takechi, K. ; Yasui, H.
Pub. info.: Vanadium compounds : chemistry, biochemistry,and therapeutic applications.  pp.344-,  1998.  Washington, DC.  American Chemical Society
Title of ser.: ACS symposium series
Ser. no.: 711
16.

Conference Proceedings
Conference Proceedings
16. Properties of C and CN Films Prepared by Mass-Separated Hyper-Thermal Carbon and Nitrogen Ions
Tsubouchi, N. ; Horino, Y. ; Enders, B. ; Chayahara, A. ; Kinomura, A. ; Fujii, K.
Pub. info.: Atomistic mechanisms in beam synthesis and irradiation of materials : symposium held December 1-2, 1997, Boston, Massachusetts, U.S.A..  pp.307-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 504
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Conference Proceedings
Conference Proceedings
17. The Nucleation of Crystalline TiSi2 Phases From Amorphous TiSix Layers and Interfacial Layers
Tung, R. T. ; Fujii, K. ; Kikuta, K. ; Chikaki, S. ; Kikkawa, T.
Pub. info.: Thin films - structure and morphology : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A..  pp.267-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 441
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Conference Proceedings
Conference Proceedings
18. Carbon Nitride Film Formation by Low-Energy Positive and Negative Ion-Beam Deposition
Tsubouchi, N. ; Horino, Y. ; Enders, B. ; Chayahara, A. ; Kinomura, A. ; Fujii, K.
Pub. info.: Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.605-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 438
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Conference Proceedings
Conference Proceedings
19. Effect of Cyclopentadienyl Fragment in Polymerization of Ethylene, Propylene, and Styrene by Nonbridged Half-Metalloce Type Titanium and Zirconium Complexes of the Type, Cp'MCl2 [N(2,6-Me2 C6 H3)(SiMe3)], -MAO Catalyst Systems
Nomura, K. ; Fujii, K.
Pub. info.: Science and technology in catalysis 2002 : proceedings of the Fourth Tokyo Conference on Advanced Catalytic Science and Technology, Tokyo, July 14-19, 2002.  pp.121-124,  2003.  Amsterdam.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 145
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Conference Proceedings
Conference Proceedings
20. Development of support systems for pathology using spectral transmittance: the quantification method of stain conditions
Fujii, K. ; Yamaguchi, M. ; Ohyama, N. ; Mukai, K.
Pub. info.: Medical Imaging 2002 : image processing : 24-28 February 2002, San Diego, USA.  Part Three  pp.1516-1523,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4684
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Conference Proceedings
Conference Proceedings
21. Oxidation and Thermal Shock Resistance of SiC Compositionally Graded Carbon Fiber-Reinforced Carbon Composite Materials
Yamada, R. ; Fujii, K.
Pub. info.: Functionally graded materials 1998 : proceedings of the 5th International Symposium on Functionally Graded Materials, held in New Town Hall, Dresden, Germany, October 26-29, 1998.  pp.902-907,  1999.  Uetikon-Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 308-311
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Conference Proceedings
Conference Proceedings
22. FORMATION OF Au COLLOID PARTICLES IN SILICA GLASS BY ION IMPLANTATION
Fukumi, K. ; Chayahara, A. ; Adachi, M. ; Kadono, K. ; Sakaguchi, T. ; Miya, M. ; Horino, Y. ; Kitamura, N. ; Hayakawa, J. ; Yamashita, H. ; Fujii, K. ; Satou, M.
Pub. info.: Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A..  pp.389-394,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 235
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Conference Proceedings
Conference Proceedings
23. Current status of 157-nm lithography using a full-field scanner
Ishimaru, T. ; Matsuura, S. ; Seki, M. ; Fujii, K. ; Koizumi, R. ; Hakataya, Y. ; Moriya, A.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.1260-1268,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
24.

Conference Proceedings
Conference Proceedings
24. Development and evaluation of an F2 laser for immersion interference lithography at 157 nm
Itakura, Y. ; Kawasa, Y. ; Wakabayashi, O. ; Moriya, M. ; Nagai, S. ; Sumitani, A. ; Hagiwara, T. ; Ishimaru, T. ; Tsuji, S. ; Fujii, K. ; Wakamiya, W.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.1269-1278,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
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Conference Proceedings
Conference Proceedings
25. Relaxation of SiGe Films for the Fabrication of Strained Si Devices
Maa, J. S. ; Tweet, D. J. ; Lee, J. J. ; Hsu, S. T. ; Fujii, K. ; Naka, T. ; Ueda, T. ; Baba, T. ; Awaya, N. ; Sakiyama, K.
Pub. info.: Intergration of heterogeneous thin-film materials and devices : symposium held April 23-24, 2003, San Francisco, California, U.S.A..  pp.3-8,  2003.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 768
26.

Conference Proceedings
Conference Proceedings
26. Relaxation of SiGe Films for the Fabrication of Strained Si Devices
Maa, J. S. ; Tweet, D. J. ; Lee, J. J. ; Hsu, S. T. ; Fujii, K. ; Naka, T. ; Ueda, T. ; Baba, T. ; Awaya, N. ; Sakiyama, K.
Pub. info.: CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A..  pp.135-140,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 765
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Conference Proceedings
Conference Proceedings
27. Phase Transformation of Titanium Disilicide Induced by High-Temperature Squttering
Fujii, K. ; Tung, R. T. ; Eaglesham, D. J. ; Kikuta, K. ; Kikkawa, T.
Pub. info.: Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA.  pp.83-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 402
28.

Conference Proceedings
Conference Proceedings
28. Electric Actuators for H-IIA Rocket TVC Systems
Fujii, K. ; Suzuki, Y. ; Mugitani, T
Pub. info.: 4th ESA International Conference on Spacecraft Guidance, Navigation, and Control Systems : and tutorial on modern and robust control, theory, tools and applications, 18-21 October 1999, ESTEC, Noordwijk, The Netherlands.  pp.575-578,  2000.  Noordwijk, Netherlands.  ESA Publications Division
Title of ser.: ESA SP
Ser. no.: 425
29.

Conference Proceedings
Conference Proceedings
29. Optimization of the chromium-shielding attenuated phase shift mask for 157-nm lithography
Kurose, E. ; Watanabe, K. ; Suganaga, T. ; Itani, T. ; Fujii, K.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XI.  pp.603-614,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5446
30.

Conference Proceedings
Conference Proceedings
30. Information reduction in hologram and reconstruction of real-time 3D images
Sato, K. ; Hamada, Y. ; Morimoto, M. ; Fujii, K.
Pub. info.: Practical Holography XIX: Materials and Applications.  pp.120-129,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5742
31.

Conference Proceedings
Conference Proceedings
31. 3D display with wide viewing zone using holograms with reduced information [6136-13]
Hamada, S. ; Sato, K. ; Morimoto, M. ; Fujii, K.
Pub. info.: Practical Holography XX: Materials and Applications.  pp.61360D-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6136
32.

Conference Proceedings
Conference Proceedings
32. Reconstruction of color images of high quality by a holographic display [6136-33]
Sato, K. ; Sugita, A. ; Morimoto, M. ; Fujii, K.
Pub. info.: Practical Holography XX: Materials and Applications.  pp.61360V-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6136
33.

Conference Proceedings
Conference Proceedings
33. Change in size of 3D image using a periodic Fourier transform hologram
Sato, K. ; Nakazaki, S. ; Morimoto, M. ; Fujii, K.
Pub. info.: Practical Holography XVII and Holographic Materials IX.  pp.398-405,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5005
34.

Conference Proceedings
Conference Proceedings
34. Information reduction in holograms by superimposing spatial frequency bands
Nakazaki, S. ; Sato, K. ; Morimoto, M. ; Fujii, K.
Pub. info.: Practical Holography XVII and Holographic Materials IX.  pp.406-413,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5005
35.

Conference Proceedings
Conference Proceedings
35. Full-color holographic display and recording of 3D images
Sugita, A. ; Sato, K. ; Morimoto, M. ; Fujii, K.
Pub. info.: Practical Holography XIX: Materials and Applications.  pp.130-139,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5742
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Conference Proceedings
Conference Proceedings
36. Optical amplification properties of a cyanine-dye-doped DNA-lipid complex fiber
Ishihara, K. ; Kumakura, Y. ; Hameed, A.S.H. ; Zhang, G. ; Eguchi, M. ; Ishikawa, T. ; Abe, H. ; Watanabe, A. ; Fukagawa, T. ; Kagami, Y. ; Fujii, K. ; Wang, L. ; Ogata, N. ; Horinouchi, S.
Pub. info.: Organic Photonic Materials and Devices V.  pp.166-174,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4991
37.

Conference Proceedings
Conference Proceedings
37. Fluoropolymers for 157-nm single-layer resists developed using a new etching rate estimation model (KI-Model)
Kawaguchi, Y. ; Sasaki, T. ; Irisawa, J. ; Yokokoji, O. ; Irie, S. ; Otoguro, A. ; Itani, T. ; Fujii, K.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.525-532,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376
38.

Conference Proceedings
Conference Proceedings
38. Advances in resist pattern transfer process using 157-nm lithography
Furukawa, T. ; Hagiwara, T. ; Kawaguchi, E. ; Matsunaga, K. ; Suganaga, T. ; Itani, T. ; Fujii, K.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.1064-1073,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376
39.

Conference Proceedings
Conference Proceedings
39. Airborne contamination control for 157-nm lithography: influence of ammonia contamination
Matsui, H. ; Kitano, J. ; Yoshihara, K. ; Kawaguchi, E. ; Furukawa, T. ; Matsunaga, K. ; Itani, T. ; Fujii, K.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.1074-1081,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376
40.

Conference Proceedings
Conference Proceedings
40. Hologram bandwidth reduction and size change of 3D images for visual display
Sato, K. ; Nakazaki, S. ; Morimoto, M. ; Fujii, K.
Pub. info.: Practical Holography XVIII: Materials and Applications.  pp.81-89,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5290
41.

Conference Proceedings
Conference Proceedings
41. 157-nm lithography with extremely high numerical aperture lens for 45-nm technology node
Suganaga, T. ; Lee, J.-W. ; Kurose, E. ; Ishimaru, T. ; Furukawa, T. ; Itani, T. ; Fujii, K. ; Cashmore, J.S. ; Gower, M.
Pub. info.: Optical Microlithography XVII.  pp.104-115,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
42.

Conference Proceedings
Conference Proceedings
42. Real-time color holography with high-resolution reflective LCD panels
Nakazaki, S. ; Sato, K. ; Morimoto, M. ; Fujii, K.
Pub. info.: Practical Holography XVIII: Materials and Applications.  pp.50-57,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5290
43.

Conference Proceedings
Conference Proceedings
43. 157-nm chromeless phase lithography with extremely high numerical aperture
Watanabe, K. ; Hagiwara, T. ; Matsuura, S. ; Suganaga, T. ; Itani, T. ; Fujii, K.
Pub. info.: Optical Microlithography XVII.  pp.537-544,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
44.

Conference Proceedings
Conference Proceedings
44. 157-nm chromeless phase lithography for 45-nm SRAM gate
Suganaga, T. ; Watanabe, K. ; Matsuura, S. ; Hagiwara, T. ; Furukawa, T. ; Itani, T. ; Fujii, K.
Pub. info.: Optical Microlithography XVII.  pp.1616-1626,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
45.

Conference Proceedings
Conference Proceedings
45. Evaluation systems of F2 laser lithography materials
Itakura, Y. ; Kawasa, Y. ; Egawa, K. ; Sumitani, A. ; Sasaki, H. ; Higasikawa, I. ; Irie, S. ; Fujii, K. ; Itani, T. ; Nakano, H. ; Hata, H.
Pub. info.: Optical Microlithography XVII.  pp.1606-1615,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
46.

Conference Proceedings
Conference Proceedings
46. Evaluation of outgassing from a fluorinated resist for 157-nm lithography
Irie, S. ; Fujii, K. ; Itakura, Y. ; Kawasa, Y. ; Egawa, K. ; Uchino, I. ; Sumitani, A. ; Itani, T.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.226-237,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376
47.

Conference Proceedings
Conference Proceedings
47. 157-nm resist assessment by a full-field scanner
Otoguro, A. ; Irie, S. ; Ishimaru, T. ; Suganaga, T. ; Itani, T. ; Fujii, K.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.245-253,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376
48.

Conference Proceedings
Conference Proceedings
48. Characterization of TFE/norbornene-based fluoropolymer resist for 157-nm lithography
Hagiwara, T. ; Furukawa, T. ; Itani, T. ; Fujii, K. ; Ishikawa, T. ; Koh, M. ; Kodani, T. ; Moriya, T. ; Yamashita, T. ; Araki, T. ; Toriumi, M. ; Aoyama, H.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.159-168,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376
49.

Conference Proceedings
Conference Proceedings
49. A new monocyclic fluropolymer structure for 157-nm photoresists
Takebe, Y. ; Eda, M. ; Okada, S. ; Yokokoji, O. ; Irie, S. ; Otoguro, A. ; Fujii, K. ; Itani, T.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.151-158,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376
50.

Conference Proceedings
Conference Proceedings
50. The dissolution behavior of tetrafluoroethylene-based fluoropolymers for 157-nm resist materials
Ishikawa, T. ; Kodani, T. ; Koh, M. ; Moriya, T. ; Araki, T. ; Aoyama, H. ; Yamashita, T. ; Toriumi, M. ; Hagiwara, T. ; Furukawa, T. ; Itani, T. ; Fujii, K.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.169-177,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376