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13 results

Conference Proceedings

1. "Si-based multilayered print circuit board for MEMS packaging fabricated by Si deep etching, bonding, and metal powder injection"

Murakoshi,Y. ; Shimizu,T. ; Takagi,H. ; Li,Y. ; Uchino,K. ; Yokoi,T. ; Maeda,R.

Pub. info.:	Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France. pp.502-509, 2001. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4408

Conference Proceedings

2. Development of multilayer mirrors for the XUV Doppler telescope

Nagata,S. ; Hara,H. ; Sakao,T. ; Shimizu,T. ; Tsuneta,S. ; Yoshida,T. ; Ishiyama.W. ; Murakami,K. ; Oshino,T.

Pub. info.:	Grazing incidence and multilayer X-ray optical systems : 27-29 July 1997, San Diego, California. pp.193-201, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3113

Conference Proceedings

3. Development of the tip-tilt mirror system for the solar XUV telescope

Kodeki,K. ; Fukushima,K. ; Kashiwase,T. ; Inoue,M. ; Shimizu,T. ; Yoshida,T. ; Sakao,T. ; Hara,H. ; Nagata,S. ; Kano,R. ; Tsuneta,S.

Pub. info.:	Space telescopes and instruments V : 25-28 March 1998, Kona, Hawaii. Part 2 pp.922-933, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3356

Conference Proceedings

4. Evaluation of the Subaru Telescope control system in-shop test erection

Noguchi,T. ; Tanaka,W. ; Sasaki,T. ; Kaifu,N. ; Noumaru,J. ; Okita,K. ; Shimizu,T. ; Itoh,N.

Pub. info.:	Telescope control systems III : 20-21 March 1998, Kona, Hawaii. pp.361-366, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3351

Conference Proceedings

5. Microfabrication technique for thick structure of metals and PZT

Shimizu,T. ; Murakoshi,Y. ; Wang,Z. ; Maeda,R. ; Sano,T.

Pub. info.:	Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part1 pp.472-477, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3680

Conference Proceedings

6. Strain measurement using a Brillouin optical time domain reflectometer for development of aircraft structure health monitoring system

Shimizu,T. ; Yari,T. ; Nagai,K. ; Takeda,N.

Pub. info.:	Advanced nondestructive evaluation for structural and biological health monitoring : 6-8 March 2001, Newport Beach, USA. pp.312-322, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4335

Conference Proceedings

7. Si-based print circuit board fabricated by Si deep etching and metal powder injection molding

Maeda,R. ; Murakoshi,Y. ; Shimizu,T. ; Li,Y. ; Takizawa,H.

Pub. info.:	Smart structures and devices : 13-15 December 2000, Melbourne, Australia. pp.209-216, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4235

Conference Proceedings

8. Photo-Induced Simultaneous Transformations of Shallow Donors and EL2 States in Semi-Insulating GaAs

Shimizu,T. ; Kobori,H. ; Ohyama,T. ; Otsuka,E.

Pub. info.:	Shallow Impurities in Semiconductors : Proceedings of the Fifth International Conference on Shallow Impurities in Semiconductors "Physics and Control of Impurities", International Conference Center Kobe, Japan, 5 to 8 August, 1992. pp.459-464, 1993. Aedermannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	117-118

Conference Proceedings

9. Effects of Si3N4 Films on Diffusion of Boron and Extended Defects in Silicon during Post-Implantation Annealing

Zaitsu,Y. ; Osada,K. ; Shimizu,T. ; Matsumoto,S. ; Yoshida,M. ; Arai,E. ; Abe,T.

Pub. info.:	Proceedings of the 18th International Conference on Defects in Semiconductors : ICDS-18, Sendai, Japan, July 23-28, 1995. pp.1891-1896, 1995. Zurich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	196-201

10.

Conference Proceedings

10. Japanese sounding rocket experiment with the solar XUV Doppler telescope

Sakao,T. ; Tsuneta,S. ; Hara,H. ; Kano,R. ; Yoshida,T. ; Nagata,S. ; Shimizu,T. ; Kosugi,T. ; Murakami,K. ; Wasa,W. ; Inoue,M. ; Miura,K. ; Taguchi,K. ; Tanimoto,K.

Pub. info.:	Missions to the sun : 8-9 August 1996, Denver, Colorado. pp.153-164, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2804

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