1.

Conference Proceedings

Conference Proceedings
Yang, T. ; Shang, S. ; Booras, J. ; Ling, M. T. K. ; Blom, H. ; Woo, L. ; Jin, H. -S. ; Marcquenski, D.
Pub. info.: ANTEC 2000 Conference proceedings, May 7-11, 2000, Orlando, Florida.  pp.3213-3216,  2000.  Brookfield Center, CT.  Society of Plastics Engineers, Inc. (SPE)
Title of ser.: Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.: 46
2.

Conference Proceedings

Conference Proceedings
Shang, S. ; Yang, T. ; Sandford, C. ; Ling, M. T. K. ; Woo, L.
Pub. info.: ANTEC 2000 Conference proceedings, May 7-11, 2000, Orlando, Florida.  pp.2740-2745,  2000.  Brookfield Center, CT.  Society of Plastics Engineers, Inc. (SPE)
Title of ser.: Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.: 46
3.

Conference Proceedings

Conference Proceedings
Word V, J. C. ; Torres, J. A. ; Roessler, T. ; Lafferty, N. ; Shang, S.
Pub. info.: Advanced microlithography technologies : 8-10 November, 2004, Beijing, China.  pp.142-153,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5645
4.

Conference Proceedings

Conference Proceedings
Shang, S. ; Yi, K. ; Huang, J. ; Shao, J. ; Fan, Z.
Pub. info.: Fifth International Conference on Thin Film Physics and Applications : 31 May-2 June, 2004, Shanghai, China.  pp.385-388,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5774
5.

Conference Proceedings

Conference Proceedings
Shang, S. ; Ling, M. T. K. ; Woo, L.
Pub. info.: Conference proceedings at ANTEC '98 : plastics on my mind, Society of Plastics Engineers, Atlanta, Georgia, April 26-April 30, 1998.  3  pp.2684-2688,  1998.  Brookfield Center, CT.  Society of Plastics Engineers, Inc. (SPE)
Title of ser.: Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.: 44(3)
6.

Conference Proceedings

Conference Proceedings
Shang, S. ; Chim, E. ; Yang, T. ; Woo, L.
Pub. info.: ANTEC '99 Conference proceedings, New York City, May 2-6, 1999 : plastics bridging the millennia.  1  pp.101-102,  1999.  Brookfield Center, CT.  Society of Plastics Engineers, Inc. (SPE)
Title of ser.: Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.: 45(1)
7.

Conference Proceedings

Conference Proceedings
Niehoff, M. ; Shang, S. ; Toublan, O.
Pub. info.: Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA.  pp.615619-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6156
8.

Conference Proceedings

Conference Proceedings
Shang, S. ; Yang, T. ; Woo, L. ; Sandford, C.
Pub. info.: ANTEC 2004, 62nd annual technical conference, Chicago, IL, May 16-20, 2004.  pp.3685-3689,  2004.  Brookfield Center, Conn..  Society of Plastics Engineers
Title of ser.: Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.: 62
9.

Conference Proceedings

Conference Proceedings
Shang, S. ; Chim, E. ; Yang, T. ; Woo, L.
Pub. info.: ANTEC '99 Conference proceedings, New York City, May 2-6, 1999 : plastics bridging the millennia.  3  pp.101-105,  1999.  Brookfield Center, CT.  Society of Plastics Engineers, Inc. (SPE)
Title of ser.: Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.: 45(3)
10.

Conference Proceedings

Conference Proceedings
Hung, C. -Y. ; Liu, Q. ; Zhang, L. ; Shang, S. ; Bailey, G. E. ; Jost, A. ; Brist, T.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.599251-599251,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992