1.

Conference Proceedings

Conference Proceedings
L. Van Look ; J. Bekaert ; P. De Bisschop ; J. Van de Kerkhove ; G. Vandenberghe
Pub. info.: Optical Microlithography XXI.  2  pp.69241Q-1-69241Q-12,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6924
2.

Conference Proceedings

Conference Proceedings
V. Philipsen ; P. De Bisschop ; K. Mesuda
Pub. info.: Photomask and next-generation lithography mask technology XV.  1  pp.702815-1-702815-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7028
3.

Conference Proceedings

Conference Proceedings
J. Bekaert ; L. Van Look ; P. De Bisschop ; J. Van de Kerkhove ; G. Vandenberghe
Pub. info.: Lithography Asia 2008.  2  pp.714027-1-714027-11,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7140
4.

Conference Proceedings

Conference Proceedings
P. De Bisschop ; V. Philipsen ; R. Birkner ; U. Buttgereit ; R. Richter
Pub. info.: Photomask technology 2007.  1  pp.67301G-1-67301G-12,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6730
5.

Conference Proceedings

Conference Proceedings
V. Philipsen ; K. Mesuda ; P. De Bisschop ; A. Erdmann ; G. Citarella
Pub. info.: Photomask technology 2007.  1  pp.67301N-1-67301N-12,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6730